Semiconductor fabrication - technology and metrology
- Författare
- Symposium on Semiconductor Processing 1988 : Santa Clara) Semiconductor Equipment and Materials Institute American Society for Testing and Materials Dinesh C. Gupta
- (Dinesh C. Gupta, editor., Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute)
- Genre
- Ej skönlitteratur, Konferenser, Konferenspublikation, Bibliografi
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| cop. 1989 | USA, Philadelphia, PA | 476 sidor. ill. |